Lithography companies

As of 2026-10-04, wafergraph tracks 7 Lithography companies across 4 countries; ASML, Carl Zeiss SMT, TRUMPF hold monopoly or leader positions. The largest by market cap is ASML at $717.2B, and the 4 priced companies total $747.7B.

Data as of 2026-10-04 · market caps from the daily wafergraph pipeline; unpriced companies are listed but not summed

7 companies in the Lithography part of the semiconductor & AI value chain.

Market share

Lithography market share 2024

Companies

  • ASML — Sole supplier of EUV lithography machines required for all leading-edge chips. monopoly · NASDAQ:ASML · $35.3B rev · Netherlands
  • Carl Zeiss SMT — Sole maker of the precision optics inside every ASML lithography system. monopoly · Germany
  • TRUMPF — Sole supplier of the CO2 drive lasers powering EUV light sources. monopoly · Germany
  • Ushio — Industrial light source maker for lithography and inspection. major · TSE:6925 · $1.1B rev · Japan
  • Canon — Supplies KrF/i-line lithography and is commercializing nanoimprint litho. challenger · TSE:7751 · $29.4B rev · Japan
  • Nikon — DUV lithography maker; distant second to ASML in scanners. challenger · TSE:7731 · $4.3B rev · Japan
  • Shanghai Micro Electronics (SMEE) — China's domestic lithography scanner developer. challenger · China

Open the interactive Lithography view →

Cite as: wafergraph, “Lithography companies — list, suppliers & market position”, https://wafergraph.com/segment/equipment_front_end/lithography/ (data as of 2026-10-04).

Track the chain

What moved in the semiconductor supply chain — This Week in the Chain, the free weekly wafergraph briefing.

Subscribe to the free weekly briefing →

Free · no login · 615 companies, updated weekly