Subsystems & Components companies

As of 2026-10-04, wafergraph tracks 18 Subsystems & Components companies across 7 countries; Atlas Copco, VAT Group, Daifuku hold monopoly or leader positions. The largest by market cap is Atlas Copco at $101.9B, and the 15 priced companies total $215.5B.

Data as of 2026-10-04 · market caps from the daily wafergraph pipeline; unpriced companies are listed but not summed

18 companies in the Subsystems & Components part of the semiconductor & AI value chain.

Companies

  • Atlas Copco — Industrial group; Edwards vacuum pumps and abatement for fabs. leader · STO:ATCO-A · $17.0B rev · Sweden
  • VAT Group — Dominant maker of vacuum valves for semiconductor process tools. leader · SIX:VACN · $1.3B rev · Switzerland
  • Daifuku — Dominant supplier of automated material handling (OHT) inside fabs. leader · TSE:6383 · $4.2B rev · Japan
  • MKS Instruments — Key subsystem supplier: RF power, vacuum gauges, lasers and optics. major · NASDAQ:MKSI · $3.9B rev · United States
  • Ebara — CMP systems maker and leading dry vacuum pump supplier. major · TSE:6361 · $2.7B rev · Japan
  • Advanced Energy — Precision power conversion for plasma processes in fab tools. major · NASDAQ:AEIS · $1.8B rev · United States
  • Horiba — Mass-flow controllers and analytical instruments for fabs. major · TSE:6856 · $2.1B rev · Japan
  • INFICON — Vacuum instrumentation and process-control sensors for fabs. major · SWX:IFCN · $674M rev · Switzerland
  • ULVAC — Vacuum equipment maker; sputtering and deposition systems for semis. major · TSE:6728 · $1.7B rev · Japan
  • Hana Materials Inc. — South Korean maker of silicon and SiC electrodes/rings consumed in semiconductor dry-etch equipment. major · KOSDAQ:166090 · $201M rev · South Korea
  • Brooks Automation — Vacuum robotics and automation for wafer handling. major · United States
  • Pfeiffer Vacuum — Vacuum-pump maker for semiconductor and analytical applications. major · Germany
  • SiCarrier — Chinese semiconductor-equipment maker spanning process and inspection tools. challenger · China
  • Ferrotec — Supplies vacuum feedthroughs, ceramics and materials to equipment makers. niche · TSE:6890 · $1.8B rev · Japan
  • Comet Group — RF power delivery and X-ray systems for semiconductor manufacturing. niche · SIX:COTN · $552M rev · Switzerland
  • Ultra Clean Holdings — Outsourced gas delivery modules and subsystems for equipment OEMs. niche · NASDAQ:UCTT · $2.1B rev · United States
  • Ichor Holdings — Fluid delivery subsystems for etch and deposition tools. niche · NASDAQ:ICHR · $948M rev · United States
  • Wonik QnC — Korean quartzware and ceramic components maker for fab tools. niche · KOSDAQ:074600 · $696M rev · South Korea

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Cite as: wafergraph, “Subsystems & Components companies — list, suppliers & market position”, https://wafergraph.com/segment/equipment_front_end/subsystems_components/ (data as of 2026-10-04).

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